講座

 

X線分光の現在
I. X線発光分光

Modern X-Ray Spectroscopy
I. X-ray Emission Spectrometry

辻 幸一
Kouichi TSUJI


X線と物質との相互作用,蛍光X線の発生の仕組みなどを説明した後,X線分光実験に必要となるX線源,X線光学素子,X線検出器などのX線要素技術について解説した.さらに,X線発光分光法として蛍光X線分析法,電子プローブX線マイクロアナリシス,荷電粒子X線発光法の3つについて取り上げ,原理と装置構成などを解説した.蛍光X線微量分析と蛍光X線微小部分析,および,3次元蛍光X線分析法について最近の研究動向と研究成果を紹介した.


X-ray fluorescence spectrometry enables non-destructive elemental analysis at ambient air pressure. In this article, after interaction between x-rays and solid matter, mechanism of emission of x-ray fluorescence are explained, recent developments of x-ray source, x-ray optics, especially x-ray polycapillary focusing optics and x-ray detector are introduced. Total reflection x-ray fluorescence and micro x-ray fluorescence, including three dimensional x-ray fluorescence analysis, have been important methods for trace and micro analysis. The principle and applications of these two techniques will be described.


Keywords: x-ray fluorescence, total reflection XRF, 3D-XRF, micro-XRF, EPMA



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