Plasma and Spectroscopic Analysis
宮原 秀一，沖野 晃俊
Inductively coupled plasma mass spectrometry (ICP-MS) and ICP atomic emission spectrometry (ICP-AES) using argon ICP as an ionization or an excitation source have been widely utilized for trace elemental analysis. To overcome some limitations of conventional argon ICP source is not perfect so some new plasma sources have been investigated. In order to utilize other gas plasma for spectroscopic analysis, multi-gas ICP source was developed. And to reduce consumption of the sample solutions, droplet direct injection nebulizer (D-DIN) and microplasma source was designed and tested. In this article, recent works of these inventions are described.
Keywords: Inductively coupled plasma, Multi gas plasma, Droplet direct injection nebulizer, Atomic emission spectrometry, Mass spectrometry, Microplasma